Development of high‐frequency‐type MEMS ultrasonic array sensor using P(VDF/TrFE) thin films - Tanaka - 2019 - Electronics and Communications in Japan - Wiley Online Library
A novel 6 × 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications
The CH-101 has a MEMS ultrasound transducer and a CMOS mixed-signal... | Download Scientific Diagram
Piezoelectric Speakers and Ultrasonic Sensors Abound: A MEMS-Based Audio Roundup - News
Frontiers | A Review of UltraHigh Frequency Ultrasonic Transducers
MEMS Sensors: TDK announces worldwide availability of MEMS-based “sonar on a silicon chip” ultrasonic time-of-flight sensors | Press Releases | News Center |TDK GLOBAL